@inproceedings{ceabd75f6fee4cf5adf37c308be8157e,
title = "Quality control and electrical properties of thin amorphous (SiC) 1-x(AlN)x films produced by radio frequency dual magnetron sputtering",
abstract = "Amorphous pseudobinary (SiC)1-x(AlN)x thin films have been produced by radio frequency dual magnetron sputtering from bulk SiC and AlN targets. For each target the emission characteristic, i.e. the spatial variation of the deposition rate was determined, in order to predict thickness distribution and spatial composition variation for the (SiC)-(AlN) alloy. Impedance spectroscopy shows a high resistivity of the films in the SiC rich region, decreasing significantly towards the AlN rich region.",
keywords = "Amorphous, Deposition rate, Impedance spectroscopy, Radio frequency magnetron sputtering, SiC-AlN alloy",
author = "{De La Puente}, {G. G{\'a}lvez} and O. Erlenbach and Torres, {J. A.Guerra} and T. Hupfer and M. Steidl and {De Zela}, F. and R. Weing{\"a}rtner and A. Winnacker",
year = "2010",
doi = "10.4028/www.scientific.net/MSF.645-648.1199",
language = "English",
isbn = "0878492798",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "1199--1202",
booktitle = "Silicon Carbide and Related Materials 2009",
note = "13th International Conference on Silicon Carbide and Related Materials 2009, ICSCRM 2009 ; Conference date: 11-10-2009 Through 16-10-2009",
}