Nanoindentation of nano-Al/Si3N4 multilayers with Vickers and Brinell indenters

M. Wang, D. Wang, M. Hopfeld, R. Grieseler, D. Rossberg, P. Schaaf

Producción científica: Contribución a una revistaArtículorevisión exhaustiva

12 Citas (Scopus)


The mechanical properties of ceramics films at the sub-micron, even nanometer length scale have attracted increased attention due to the high-speed development of microelectronic technology. In this work, nano-indentation hardness as a function of the different individual layer thickness has been measured and investigated in the sputtered Al/Si3N4 multilayers with different indenters (Vickers and Brinell). For this ceramics/metal multilayers system, the hardness of the multilayers increases with decreasing individual layer thickness from 500nm to 100nm and from 50nm to 10nm, indicating a significant size effect. At the same time, changes in the deformation behavior may be controlled by different deformation mechanisms for submicron scale and nanometer scale.

Idioma originalInglés
Páginas (desde-hasta)2355-2358
Número de páginas4
PublicaciónJournal of the European Ceramic Society
EstadoPublicada - oct. 2013
Publicado de forma externa


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