Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Valentin Sarmiento, Miguel Asmad, J. Ivan Choque, Guillermo Baldwin

Producción científica: Capítulo del libro/informe/acta de congresoContribución a la conferenciarevisión exhaustiva

Resumen

The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form.

Idioma originalInglés
Título de la publicación alojada8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications
DOI
EstadoPublicada - 2013
Evento8th Iberoamerican Optics Meeting, RIAO 2013 and 11th Latin American Meeting on Optics, Lasers, and Applications, OPTILAS 2013 - Porto, Portugal
Duración: 22 jul. 201326 jul. 2013

Serie de la publicación

NombreProceedings of SPIE - The International Society for Optical Engineering
Volumen8785
ISSN (versión impresa)0277-786X
ISSN (versión digital)1996-756X

Conferencia

Conferencia8th Iberoamerican Optics Meeting, RIAO 2013 and 11th Latin American Meeting on Optics, Lasers, and Applications, OPTILAS 2013
País/TerritorioPortugal
CiudadPorto
Período22/07/1326/07/13

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