Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Valentin Sarmiento; M. Asmad; J. Ivan Choque; Guillermo E. Baldwin

Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Valentin Sarmiento, M. Asmad, J. Ivan Choque, Guillermo E. Baldwin

Pontificia Universidad Catolica del Peru

Producción científica: Capítulo del libro/informe/acta de congreso › Contribución a la conferencia › revisión exhaustiva

Resumen

The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form. © 2013 SPIE.

Idioma original	Español
Título de la publicación alojada	Proceedings of SPIE - The International Society for Optical Engineering
Volumen	8785
Estado	Publicada - 1 dic. 2013
Publicado de forma externa	Sí

Caracterización y medida morfológica de películas delgadas mediante microscopia inteferencial y técnicas de obtención Digital de la fase óptica.
Asmad Vergara, M. A. (Investigador principal), Baldwin Olguin, G. E. (Coinvestigador), Luis Manuel, L. M. (Coinvestigador), Choque Aquino, J. I. (Otro) & Sarmiento Pumarayme, V. J. (Otro)
1/01/12 → 1/11/12
Proyecto: Investigación

Citar esto

@inproceedings{5ea05885dfae4a69989c812543a70527,

title = "Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy",

abstract = "The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form. {\textcopyright} 2013 SPIE.",

author = "Valentin Sarmiento and M. Asmad and Choque, {J. Ivan} and Baldwin, {Guillermo E.}",

year = "2013",

month = dec,

day = "1",

language = "Espa{\~n}ol",

volume = "8785",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy. / Sarmiento, Valentin; Asmad, M.; Choque, J. Ivan et al.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8785 2013.

Producción científica: Capítulo del libro/informe/acta de congreso › Contribución a la conferencia › revisión exhaustiva

TY - GEN

T1 - Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

AU - Sarmiento, Valentin

AU - Asmad, M.

AU - Choque, J. Ivan

AU - Baldwin, Guillermo E.

PY - 2013/12/1

Y1 - 2013/12/1

N2 - The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form. © 2013 SPIE.

AB - The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form. © 2013 SPIE.

M3 - Contribución a la conferencia

VL - 8785

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Resumen

Proyectos

Caracterización y medida morfológica de películas delgadas mediante microscopia inteferencial y técnicas de obtención Digital de la fase óptica.

Citar esto