Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Valentin Sarmiento, M. Asmad, J. Ivan Choque, Guillermo E. Baldwin

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The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form. © 2013 SPIE.
Idioma originalEspañol
Título de la publicación alojadaProceedings of SPIE - The International Society for Optical Engineering
EstadoPublicada - 1 dic. 2013
Publicado de forma externa

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