Influence of substrate temperature on the properties of Ag-C films produced by DC Magnetron Sputtering

Silver-carbon films (Ag-C), rich in silver, deposited by DC magnetron sputtering from a silver target (Ag) into silicon substrate (100) in atmosphere of argon/acetylene plasma, have been studied in function of the substrate temperature (as-deposited, 200°C and 300°C). The Ag-C films were obtained using an acetylene gas flow of 0.3 sccm and dc cathode current of 180mA. Ag-C films were characterized by X-ray diffraction, Raman spectroscopy and scanning electron microscopy. It has been observed the decrease of graphite-like bonds in the Ag-C films with the substrate temperature. The SEM revealed that the substrate temperature promotes changes on the surface morphology. These changes on the chemistry and surface morphology are discussed in terms of atoms diffusion on the surface and the chemical composition of the Ag-C films.