Elastic properties of nanolaminar Cr2AlC films and beams determined by in-situ scanning electron microscope bending tests

Rolf Grieseler, Felix Theska, Thomas Stürzel, Bernd Hähnlein, Mike Stubenrauch, Marcus Hopfeld, Thomas Kups, Jörg Pezoldt, Peter Schaaf

Producción científica: Contribución a una revistaArtículorevisión exhaustiva

4 Citas (Scopus)

Resumen

The mechanical properties of Cr2AlC MAX phase structures were investigated by in-situ bending tests. Freestanding structures such as cantilevers and doubly clamped beams of Cr2AlC were produced. The structures exhibit a Young's modulus of 184 GPa which is close to the value obtained by vibrational measurements. The in-situ bending test allows the determination of the mechanical properties with a lower variance of the measurement results compared to the vibrational measurement. The results are a good starting point for the development of microelectromechanical structures based on MAX phases.

Idioma originalInglés
Páginas (desde-hasta)85-89
Número de páginas5
PublicaciónThin Solid Films
Volumen604
DOI
EstadoPublicada - 1 abr. 2016
Publicado de forma externa

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