@inproceedings{b99b7197380d4531a03dee6c52f06e3f,
title = "Effect of nitrogen dilution in the optical properties of amorphous SiC thin films",
abstract = "The effect of the nitrogen dilution on the optical and vibrational properties of amorphous silicon carbide (a-SiC) and silicon oxycarbide (a-SiCO) layers have been studied. The films were prepared by radio frequency (rf) reactive magnetron sputtering using an atmosphere mixture of argon (Ar) and nitrogen (N2). The oxygen (O2) was incorporated according to the base pressure used of each deposition process. The optical and vibrational properties of the films were characterized by means of UV/VIS transmittance measurements and Fourier transform infrared spectroscopy (FTIR), respectively. A relationship between the variation of the optical bandgap and the increase or quench of vibrational modes is established. This analysis reveals that the increase of nitrogen in both host matrices a-SiC and a-SiCO induced the formation of C=N and C≡N bonds thus reducing the bandgap of the material.",
keywords = "FTIR, Optical bandgap, RF magnetron sputtering, Silicon carbide",
author = "Liz Monta{\~n}ez and Guerra, {J. Andr{\'e}s} and {De Zela}, Francisco and Albrecht Winnaker and Roland Weing{\"a}rtner",
note = "Publisher Copyright: {\textcopyright} (2015) Trans Tech Publications, Switzerland.; European Conference on Silicon Carbide and Related Materials, ECSCRM 2014 ; Conference date: 21-09-2014 Through 25-09-2014",
year = "2015",
doi = "10.4028/www.scientific.net/MSF.821-823.217",
language = "English",
isbn = "9783038354789",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "217--220",
editor = "Didier Chaussende and Gabriel Ferro",
booktitle = "Silicon Carbide and Related Materials 2014",
}