@inproceedings{e36ef2699ee74b0b84888f20cccc2b40,
title = "Determination of the optical bandgap of thin amorphous (SiC) 1-x(AlN)x films",
abstract = "Amorphous wide bandgap semiconductor thin films of the pseudobinary compound (SiC)1-x(AlN)x were grown by radio frequency dual magnetron sputtering on CaF2, MgO and glass substrates. We performed isochronical annealing steps up to 500°C. The optical bandgap is determined for each composition from spectroscopic transmission measurement in two different ways: according to Tauc and using the (ahv)2 plot. The dependence of the optical bandgap on the composition x can be described by Vegard's empirical law for alloys.",
keywords = "Absorption coefficient, Amorphous, Bandgap engineering, Magnetron sputtering, Tauc-gap",
author = "Guerra, {J. A.} and A. Winterstein and O. Erlenbach and G. G{\'a}lvez and {De Zela}, F. and R. Weing{\"a}rtner and A. Winnacker",
year = "2010",
doi = "10.4028/www.scientific.net/MSF.645-648.263",
language = "English",
isbn = "0878492798",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "263--266",
booktitle = "Silicon Carbide and Related Materials 2009",
note = "13th International Conference on Silicon Carbide and Related Materials 2009, ICSCRM 2009 ; Conference date: 11-10-2009 Through 16-10-2009",
}