Resumen
Amorphous wide bandgap semiconductor thin films of the pseudobinary compound (SiC)1-x(AlN)x doped with terbium were grown by trial rf magnetron sputtering on CaF2 and glass substrates. The optical bandgap of the films in dependence of the composition x has been determined from transmission measurements using the (αhν)2 versus energy plot and the Tauc-plot. The bandgap varies from 2.2 eV for x = 0 (SiC) to 4.7 eV for x = 0.94 (almost pure AlN) and can be described by Vegard's law using the bowing parameter (3.18 ± 1.01) eV. Cathodoluminescence measurements show the typical terbium emission pattern. Thermal activation of the thin films with isochronical annealing from 300 °C to 1150 °C leads to strong increase of the emission with an optimal annealing temperature of 1100 °C.
Idioma original | Inglés |
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Páginas (desde-hasta) | 114-118 |
Número de páginas | 5 |
Publicación | Materials Science and Engineering: B |
Volumen | 174 |
N.º | 1-3 |
DOI | |
Estado | Publicada - 25 oct. 2010 |