Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Valentin Sarmiento, Miguel Asmad, J. Ivan Choque, Guillermo Baldwin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form.

Original languageEnglish
Title of host publication8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications
DOIs
StatePublished - 2013
Event8th Iberoamerican Optics Meeting, RIAO 2013 and 11th Latin American Meeting on Optics, Lasers, and Applications, OPTILAS 2013 - Porto, Portugal
Duration: 22 Jul 201326 Jul 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8785
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference8th Iberoamerican Optics Meeting, RIAO 2013 and 11th Latin American Meeting on Optics, Lasers, and Applications, OPTILAS 2013
Country/TerritoryPortugal
CityPorto
Period22/07/1326/07/13

Keywords

  • Interference fringes
  • Interferometer
  • Optical phase

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