Elastic properties of nanolaminar Cr2AlC films and beams determined by in-situ scanning electron microscope bending tests

Rolf Grieseler; Felix Theska; Thomas Stürzel; Bernd Hähnlein; Mike Stubenrauch; Marcus Hopfeld; Thomas Kups; Jörg Pezoldt; Peter Schaaf

doi:10.1016/j.tsf.2016.03.026

Elastic properties of nanolaminar Cr₂AlC films and beams determined by in-situ scanning electron microscope bending tests

Rolf Grieseler, Felix Theska, Thomas Stürzel, Bernd Hähnlein, Mike Stubenrauch, Marcus Hopfeld, Thomas Kups, Jörg Pezoldt, Peter Schaaf

Technical University of Ilmenau

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The mechanical properties of Cr₂AlC MAX phase structures were investigated by in-situ bending tests. Freestanding structures such as cantilevers and doubly clamped beams of Cr₂AlC were produced. The structures exhibit a Young's modulus of 184 GPa which is close to the value obtained by vibrational measurements. The in-situ bending test allows the determination of the mechanical properties with a lower variance of the measurement results compared to the vibrational measurement. The results are a good starting point for the development of microelectromechanical structures based on MAX phases.

Original language	English
Pages (from-to)	85-89
Number of pages	5
Journal	Thin Solid Films
Volume	604
DOIs	https://doi.org/10.1016/j.tsf.2016.03.026
State	Published - 1 Apr 2016
Externally published	Yes

Keywords

CrAlC
In-situ testing
MAX phase
MEMS
Thin film
Young's modulus

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10.1016/j.tsf.2016.03.026

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title = "Elastic properties of nanolaminar Cr2AlC films and beams determined by in-situ scanning electron microscope bending tests",

abstract = "The mechanical properties of Cr2AlC MAX phase structures were investigated by in-situ bending tests. Freestanding structures such as cantilevers and doubly clamped beams of Cr2AlC were produced. The structures exhibit a Young's modulus of 184 GPa which is close to the value obtained by vibrational measurements. The in-situ bending test allows the determination of the mechanical properties with a lower variance of the measurement results compared to the vibrational measurement. The results are a good starting point for the development of microelectromechanical structures based on MAX phases.",

keywords = "CrAlC, In-situ testing, MAX phase, MEMS, Thin film, Young's modulus",

author = "Rolf Grieseler and Felix Theska and Thomas St{\"u}rzel and Bernd H{\"a}hnlein and Mike Stubenrauch and Marcus Hopfeld and Thomas Kups and J{\"o}rg Pezoldt and Peter Schaaf",

year = "2016",

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doi = "10.1016/j.tsf.2016.03.026",

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T1 - Elastic properties of nanolaminar Cr2AlC films and beams determined by in-situ scanning electron microscope bending tests

AU - Grieseler, Rolf

AU - Theska, Felix

AU - Stürzel, Thomas

AU - Hähnlein, Bernd

AU - Stubenrauch, Mike

AU - Hopfeld, Marcus

AU - Kups, Thomas

AU - Pezoldt, Jörg

AU - Schaaf, Peter

PY - 2016/4/1

Y1 - 2016/4/1

N2 - The mechanical properties of Cr2AlC MAX phase structures were investigated by in-situ bending tests. Freestanding structures such as cantilevers and doubly clamped beams of Cr2AlC were produced. The structures exhibit a Young's modulus of 184 GPa which is close to the value obtained by vibrational measurements. The in-situ bending test allows the determination of the mechanical properties with a lower variance of the measurement results compared to the vibrational measurement. The results are a good starting point for the development of microelectromechanical structures based on MAX phases.

AB - The mechanical properties of Cr2AlC MAX phase structures were investigated by in-situ bending tests. Freestanding structures such as cantilevers and doubly clamped beams of Cr2AlC were produced. The structures exhibit a Young's modulus of 184 GPa which is close to the value obtained by vibrational measurements. The in-situ bending test allows the determination of the mechanical properties with a lower variance of the measurement results compared to the vibrational measurement. The results are a good starting point for the development of microelectromechanical structures based on MAX phases.

KW - CrAlC

KW - In-situ testing

KW - MAX phase

KW - MEMS

KW - Thin film

KW - Young's modulus

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DO - 10.1016/j.tsf.2016.03.026

M3 - Article

AN - SCOPUS:84962034296

SN - 0040-6090

VL - 604

SP - 85

EP - 89

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Elastic properties of nanolaminar Cr₂AlC films and beams determined by in-situ scanning electron microscope bending tests

Abstract

Keywords

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