AlGaN based MEMS structures

Bernd Hähnlein; Katja Tonisch; Gernot Ecke; Rolf Grieseler; Steffen Michael; Peter Schaaf; Jörg Pezoldt

doi:10.1002/pssc.201300153

AlGaN based MEMS structures

Bernd Hähnlein, Katja Tonisch, Gernot Ecke, Rolf Grieseler, Steffen Michael, Peter Schaaf, Jörg Pezoldt

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Al_xGa_1-xN solid solutions were heteroepitaxially grown on 3C-SiC(111)/Si(111) pseudo substrates fabricated by low pressure chemical vapour deposition. Free standing doubly-clamped resonator bars and cantilevers were fabricated from these Al_xGa_1-xN layers. The resonance frequencies of the microelectromechanical structures were measured using electrostatic excitation and vibrometry at ambient conditions. The obtained resonance frequencies allowed a self consistent determination of the Young's modulus of the Al_xGa_1-xN layers and the residual strain in the free standing structures.

Original language	English
Pages (from-to)	239-243
Number of pages	5
Journal	Physica Status Solidi (C) Current Topics in Solid State Physics
Volume	11
Issue number	2
DOIs	https://doi.org/10.1002/pssc.201300153
State	Published - Feb 2014
Externally published	Yes

Keywords

AlGaN alloy
Heteroepitaxy
MEMS
Stress
Youngs modulus

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10.1002/pssc.201300153

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title = "AlGaN based MEMS structures",

abstract = "AlxGa1-xN solid solutions were heteroepitaxially grown on 3C-SiC(111)/Si(111) pseudo substrates fabricated by low pressure chemical vapour deposition. Free standing doubly-clamped resonator bars and cantilevers were fabricated from these AlxGa1-xN layers. The resonance frequencies of the microelectromechanical structures were measured using electrostatic excitation and vibrometry at ambient conditions. The obtained resonance frequencies allowed a self consistent determination of the Young's modulus of the AlxGa1-xN layers and the residual strain in the free standing structures.",

keywords = "AlGaN alloy, Heteroepitaxy, MEMS, Stress, Youngs modulus",

author = "Bernd H{\"a}hnlein and Katja Tonisch and Gernot Ecke and Rolf Grieseler and Steffen Michael and Peter Schaaf and J{\"o}rg Pezoldt",

year = "2014",

month = feb,

doi = "10.1002/pssc.201300153",

language = "English",

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pages = "239--243",

journal = "Physica Status Solidi (C) Current Topics in Solid State Physics",

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T1 - AlGaN based MEMS structures

AU - Hähnlein, Bernd

AU - Tonisch, Katja

AU - Ecke, Gernot

AU - Grieseler, Rolf

AU - Michael, Steffen

AU - Schaaf, Peter

AU - Pezoldt, Jörg

PY - 2014/2

Y1 - 2014/2

N2 - AlxGa1-xN solid solutions were heteroepitaxially grown on 3C-SiC(111)/Si(111) pseudo substrates fabricated by low pressure chemical vapour deposition. Free standing doubly-clamped resonator bars and cantilevers were fabricated from these AlxGa1-xN layers. The resonance frequencies of the microelectromechanical structures were measured using electrostatic excitation and vibrometry at ambient conditions. The obtained resonance frequencies allowed a self consistent determination of the Young's modulus of the AlxGa1-xN layers and the residual strain in the free standing structures.

AB - AlxGa1-xN solid solutions were heteroepitaxially grown on 3C-SiC(111)/Si(111) pseudo substrates fabricated by low pressure chemical vapour deposition. Free standing doubly-clamped resonator bars and cantilevers were fabricated from these AlxGa1-xN layers. The resonance frequencies of the microelectromechanical structures were measured using electrostatic excitation and vibrometry at ambient conditions. The obtained resonance frequencies allowed a self consistent determination of the Young's modulus of the AlxGa1-xN layers and the residual strain in the free standing structures.

KW - AlGaN alloy

KW - Heteroepitaxy

KW - MEMS

KW - Stress

KW - Youngs modulus

UR - http://www.scopus.com/inward/record.url?scp=84894466663&partnerID=8YFLogxK

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DO - 10.1002/pssc.201300153

M3 - Article

AN - SCOPUS:84894466663

SN - 1862-6351

VL - 11

SP - 239

EP - 243

JO - Physica Status Solidi (C) Current Topics in Solid State Physics

JF - Physica Status Solidi (C) Current Topics in Solid State Physics

IS - 2

ER -

AlGaN based MEMS structures

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Keywords

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